Analysis of Micromilling Process Parameters for Silicon-based Flow Cytometer Microfluidics Device

Muhammad Syafiq Rahim,Abang Annuar Ehsan and B.T. Hang Tuah Baharudin


Objective - This study investigates and analyses some of the micromilling process parameters that have been adopted for the micro channel device fabrication.

Methodology/Technique - The CNC micromilling process has been proposed due to its ability to produce micro structures directly from digital computer aided design (CAD). The microfluidics device has a channel width of 200 μm with a rectangular cross section whereas its channel depth is about 50 μm. The micromilling process study will involve the use of uncoated (carbide) and diamond coated micron-sized endmill using a high-speed CNC milling machine. The analysis of the micromilling process will involve the characterization of the fabricated silicon micro channels using both geometrical and surface integrity analyses.

Findings - The results show that the roughness for a diamond coated endmill tool provides the lowest roughness of about 99.3 nm compare to that of the uncoated endmill tool which gives a surface roughness of 397.5 nm.

Novelty - The surface integrity measurement involves the measurement of surface topography of the machined surface which shows the effect of the diamond coating endmill on the surface roughness. The lowest surface roughness as measured was 99.34 nm for diamond coated endmill with a feed rate and depth of cut of 5mm/min and 1 μm respectively.

Type of Paper: Empirical/Review

Keywords: CNC, Cytometer, Hydrodynamic Focusing, Microfluidics, Micro Milling, Silicon

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